QUARTZ

          From 4 inch To 12 inch
          Diffusion/LPCVD Quartz Products

Tube  
          Process Tube, Double Tube, Inner/Outer               Tube

Boat  
          
Ring Boat, Vertical/Horizontal Boat
          Cap, Pedestal
          Injector, Nozzle
          Others


          From 6 inch To 12 inch
          DRY Etch/Wet Etch Quartz Products

Ring 
          Cover Ring, Shield Ring, Focus Ring,
          Shadow Ring , Pedestal Ring

Plate/Disc 
          Base Plate, Top Disc, Window  

Wet Bath

Robot Chuck, Wafer Guide

Others


From 6 inch To 12 inch
RTP/THIN FILM Quartz Products

RTP   
          RTP Tube, Wafer Tray, Door Aperture,                  Elbow, Gas Distributor, Quartz Pin 

THIN FILM 
          Bell Jar
          Dome
          Insulator, Window, Liner

 


From 6 inch To 12 inch
Halogen Lamp, UV LAMP
Customer Designed Products