QUARTZ
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From 4 inch To 12 inch
Diffusion/LPCVD Quartz Products
Tube
Process Tube, Double Tube, Inner/Outer Tube
Boat
Ring Boat, Vertical/Horizontal Boat
Cap, Pedestal
Injector, Nozzle
Others
From 6 inch To 12 inch
DRY Etch/Wet Etch Quartz Products
Ring
Cover Ring, Shield Ring, Focus Ring,
Shadow Ring , Pedestal Ring
Plate/Disc
Base Plate, Top Disc, Window
Wet Bath
Robot Chuck, Wafer Guide
Others
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From 6 inch To 12 inch
RTP/THIN FILM Quartz Products
RTP
RTP Tube, Wafer Tray, Door Aperture, Elbow, Gas Distributor, Quartz Pin
THIN FILM
Bell Jar
Dome
Insulator, Window, Liner
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From 6 inch To 12 inch
Halogen Lamp, UV LAMP
Customer Designed Products